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Dec 03, 2024
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AE 579 - Micro/Nano ElectroMechanical Systems/Sensors (MEMS/NEMS)3 Credit Hours
Scaling law, lithography, wet etching, dry etching, physical vapor deposition, chemical vapor deposition, electrochemical deposition, electrostatic/piezoelectric/thermal/tactile sensing and actuation.
Cross-listed: (Same as: Mechanical Engineering 579 and Biomedical Engineering 579.)
(DE) Prerequisite(s): Undergrad level Engineering Mechanics, Fluid Mechanics, Heat Transfer.
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