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    Aug 16, 2022  
2022-2023 Graduate Catalog 
    
2022-2023 Graduate Catalog
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AE 579 - Micro/Nano ElectroMechanical Systems/Sensors (MEMS/NEMS)

3 Credit Hours
Scaling law, lithography, wet etching, dry etching, physical vapor deposition, chemical vapor deposition, electrochemical deposition, electrostatic/piezoelectric/thermal/tactile sensing and actuation.
Cross-listed: (Same as: Mechanical Engineering 579 and Biomedical Engineering 579.)

(DE) Prerequisite(s): Undergrad level Engineering Mechanics, Fluid Mechanics, Heat Transfer.



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