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Nov 21, 2024
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MSE 630 - Thin Film Materials Processing3 Credit Hours
Students learn materials issues and thin film processing techniques used to manufacture semiconductor devices. Topics include basic vacuum technology, plasma physics, sputtering, evaporation (resistive, electron beam, laser ablation), chemical vapor deposition, and etching. The mechanisms of each process are explored and relevant material chemistries are discussed. Thin film growth models are also explained and processing variables are related to material properties.
Registration Restriction(s): Minimum student level – graduate.
Registration Permission: Consent of instructor.
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